Products

Chemical MFC Operation Module

Product Overview

  • Classification

    Semiconductor

  • Product name(KO)

    Chemical MFC 운용모듈

  • Product name(EN)

    Chemical MFC Operation Module

  • Product No

    FMS-SD-3

  • Explanation

    Module equipment that enables the acquisition of skills in the operation, maintenance, and validation of Chemical Mass Flow Controllers (MFC) based on an understanding of semiconductor cleaning processes.

Product Components

Classification Product Name Quantity Note
1Chemical MFC Operation Module1
2Maintenance and Verification Tools1

Product Features

  • Detail

    Providing various practical contents to facilitate understanding of semiconductor cleaning process principles. 

    Designed with a modular structure that allows learners to directly engage in practical training for piping facilities.

    Enables learning in tools for piping, pipe joining and forming, measurement and processing, piping construction, commissioning, and MFC operation.

  • Main Keywords

    Semiconductor Cleaning ProcessPractical Contents Modular FormingMFC Processing